Electron Microprobe

The electron microprobe is an analytical device for elemental analysis on solids such as minerals, metals, and glasses at high spatial resolution. Elements from the atomic number 5 (Boron) to element number 92 (Uranium) may and analyzed. The instrument is equipped with five wavelength dispersive spectrometers and with an energy dispersive spectrometer. It is further equipped with a secondary electron detector and with a backscattered electron detector.